Oxalyl fluoride is the organofluorine compound with the formula (COF)2. It is a fluorinated derivative of oxalic acid. This colorless liquid is prepared by reaction of sodium fluoride with oxalyl chloride.[1]

Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.[2][3]

See also

References

  1. ^ C. W. Tullock, D. D. Coffman (1960). "Synthesis of Fluorides by Metathesis with Sodium Fluoride". J. Org. Chem. 25 (11): 2016–2019. doi:10.1021/jo01081a050.
  2. ^ Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
  3. ^ Simon Karecki; Ritwik Chatterjee; Laura Pruette; Rafael Reif; Terry Sparks; Laurie Beu; Victor Vartanian & Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141 – G149. Bibcode:2001JElS..148G.141K. doi:10.1149/1.1348263.
Allikas: https://en.wikipedia.org/wiki/Oxalyl_fluoride
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