Sulfur fluoride may refer to any of the following sulfur fluorides:

• Sulfur hexafluoride, SF₆
• Disulfur decafluoride, S₂F₁₀
• Sulfur tetrafluoride, SF₄
• Disulfur tetrafluoride, S₂F₄
• Sulfur difluoride, SF₂
• Disulfur difluoride, S₂F₂
• Thiothionyl fluoride, S₂F₂ (second isomer)
• 1,3-Difluoro-trisulfane-1,1-difluoride, S₃F₄

• Chlorine oxides, some of which are valence isoelectronic with sulfur fluorides